Quartz Wafer Substrate
Quartz Wafer Substrates wafers ne da farko da aka yi da ma'auni mai tsafta (SiO₂), ana amfani da su sosai a cikin semiconductor, optoelectronics, micro{1} tsarin lantarki (MEMS), na'urorin gani, da sauran filayen.
Bayani
Kayayyakin Kayayyaki
- Babban Tsafta:Yawanci an yi shi daga ma'adini na roba (misali, silica fused), tare da tsaftar tsafta (Mafi girma ko dai-dai da 99.99%) da ƙarancin ƙazanta don gujewa shafar aikin na'urar.
- Ƙarfin Ƙarfi:Low coefficient na thermal faɗaɗa (≈0.55×10⁻⁶/ digiri) da kuma high -zazzabi juriya (laushi batu ~1600 digiri), dace da high -tsarin zafin jiki.
- Ayyukan gani:Faɗin watsawa (UV zuwa IR), tare da keɓaɓɓen watsawar UV, manufa don mashin hoto, ruwan tabarau, da sauransu.
- Rashin Inertness:Resistance zuwa acid da alkalis (sai dai hydrofluoric acid), dace da rigar etching matakai.
- Rufin Lantarki:High resistivity (>10¹⁶ Ω·cm), wanda ya dace don sanya shinge ko manyan na'urori masu mitoci{{1}.
Aikace-aikace
Semiconductor Manufacturing
{0} Photomask substrates
- Abubuwan haɗin lithography na EUV
- Masu sarrafa wafer
Photonics & Optoelectronics
- Ƙaƙƙarfan raƙuman ruwa na gani
- Laser diode hawa
{0}} Abubuwan ƙididdiga na ƙididdiga
Aikace-aikace na Musamman
{0}} Tushen resonator na MEMS
- Na'urar hangen nesa ta sararin samaniya
Tsarukan Laser mai ƙarfi - Babban{1}
Tsarin Masana'antu
- Rukunin Raw Material Synthesis:Samar da ta hanyar shigar tururi (misali, SiCl₄ oxidation) ko tsarkakewar ma'adini na halitta.
- Narkewa da Samarwa:Narkewar zafi mai girma{0} yana biyo baya ta hanyar sanyaya cikin ingots ko zane kai tsaye zuwa sanduna.
- Yanke:Yanke shi cikin ƙwanƙwasa sirara ta amfani da zato na lu'u-lu'u ko yankan Laser.
- Nika da gogewa:Kemikal polishing (CMP) ya cimma nanometer{0}}santsi matakin.
- Tsaftacewa da dubawa:Cire barbashi da gurɓataccen ƙarfe, tare da lahani da gwajin siga.
Kayayyaki
|
Abubuwan Jiki |
Darajoji |
|
Tsafta |
＞99.99% |
|
Yawan yawa |
2.2g/cm3 |
|
Bayyana gaskiya |
＞90% |
|
Mohs Hardness |
5.5--6.5 |
|
Wurin Lalacewa |
1280 digiri |
|
Wurin Tausasawa |
1750 digiri |
|
Annealing Point |
1250 digiri |
|
Takamaiman Zafi ({0}} digiri) |
670J/kg. digiri |
|
Thermal Conductivity (20 digiri) |
1.4W/m. digiri |
|
Haɓakar zafi (w/mk, digiri 1000) |
1.0-1.2 |
|
Fihirisar Refractive |
1.4585 |
|
Coefficient na Thermal Expansion |
5.510 -7cm/cm. digiri |
|
Zazzafi - mai aiki |
1750-2050 digiri |
|
Zazzabi na ɗan gajeren lokaci - Sabis |
1450 digiri |
|
Dogon lokaci - Zazzabi na Sabis |
1100 digiri |
|
Abubuwan Sinadarai |
Darajoji |
|
Acid resistant |
Acid mai ƙarfi (sai dai HF), alkali mai ƙarfi, maganin kwayoyin halitta |
|
Babban yanayin zafi Mai jure lalata |
Madalla |
|
Ƙarfe Najasa Abun ciki |
ku 5ppm |
|
Abubuwan Lantarki |
Darajoji |
|
Resistivity |
7107Ω.cm |
|
Ƙarfin Insulation |
250 ~ 400Kv/cm |
|
Dielectric Constant |
3.7~3.9 |
|
Dielectric Absorption Coefficient |
＜410-4 |
|
Dielectric Loss Coefficient |
＜110-4 |
|
Kayayyakin Injini |
Darajoji |
|
Ƙarfin Ƙarfi |
1100MPa |
|
Lankwasawa Ƙarfin |
67MPa |
|
Ƙarfin Ƙarfin Ƙarfi |
48MPa |
|
Rabon Poisson |
0.14~0.17 |
|
Modul na Matasa |
72000MPa |
|
Modulus Shear |
31000MPa |
FAQ
Q1: Menene matsakaicin girman ma'aunin wafer na ma'adini?
A: Standard samar har zuwa 300mm diamita, tare da 450mm prototypes samuwa ga R&D.
Q2: Za a iya samar da musamman kauri profiles?
A: Ee - za mu iya samarwa:
{0} Wafers (don aikace-aikacen Laser)
- Madaidaicin ƙirar ƙira
- Mesa{1} da aka tsara
Q3: Wace ƙa'idar tsaftacewa kuke ba da shawarar?
A: Tsaftataccen tsari na RCA daidai:
1. Kauwar kwayoyin halitta (H₂SO₄:H₂O₂)
2. Ionic tsaftacewa (HCl: H₂O₂)
3. HF{1}} na ƙarshe don saman ruwa
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